Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection

Yu Lu; Lin Kai; Caiyi Chen; Qing Yang; Yizhao Meng; Yi Liu; Yang Cheng; Xun Hou; Feng Chen

doi:10.1117/1.APN.1.2.026004

Advanced Photonics Nexus, Volume. 1, Issue 2, 026004(2022)

Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection Article Video

Yu Lu^1,2、†, Lin Kai^1,2, Caiyi Chen^1,2, Qing Yang³, Yizhao Meng^1,2, Yi Liu^1,2, Yang Cheng³, Xun Hou^1,2, and Feng Chen^1,2、*

Author Affiliations

¹Xi’an Jiaotong University, State Key Laboratory for Manufacturing System Engineering, Xi’an, China

²Xi’an Jiaotong University, School of Electronic Science and Engineering, Shaanxi Key Laboratory of Photonics Technology for Information, Xi’an, China

³Xi’an Jiaotong University, School of Mechanical Engineering, Xi’an, China

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Yu Lu, Lin Kai, Caiyi Chen, Qing Yang, Yizhao Meng, Yi Liu, Yang Cheng, Xun Hou, Feng Chen. Nanochannels with a 18-nm feature size and ultrahigh aspect ratio on silica through surface assisting material ejection[J]. Advanced Photonics Nexus, 2022, 1(2): 026004

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Paper Information

Category: Research Articles

Received: Jun. 20, 2022

Accepted: Sep. 28, 2022

Published Online: Nov. 15, 2022

The Author Email: Chen Feng (chenfeng@mail.xjtu.edu.cn)

DOI:10.1117/1.APN.1.2.026004

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology