Laser & Optoelectronics Progress, Volume. 59, Issue 11, 1122005(2022)

Design and Simulation of Far Infrared Microscopic Imaging Optical Systems

Yue Wang1,2, Aiyun Liu1, Wangzhou Shi1, Gujin Hu1、*, Chixian Liu2, Changyi Pan2, Yufeng Shan2, Yi Zhang2, Huiyong Deng2、**, and Ning Dai2
Author Affiliations
  • 1Department of Physics, College of Mathematics and Science, Shanghai Normal University, Shanghai 200234, China
  • 2State Key Laboratory for Infrared Physics, Shanghai Institute of Technical Physics, Chinese Academy of Sciences, Shanghai 200083, China
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    Figures & Tables(9)
    Cross-sectional diagram of far infrared microscopic imaging optical system
    Simulated MTF curve of far infrared microscopic imaging optical system
    Simulated spot diagrams of far infrared microscopic imaging optical system
    Simulated field curvature of far infrared microscopic imaging optical system
    Simulated distortion of far infrared microscopic imaging optical system
    Enclosed energy map of optical system
    • Table 1. Parameter indexes of far infrared microscopic imaging optical system

      View table

      Table 1. Parameter indexes of far infrared microscopic imaging optical system

      ItemValue
      Working wave range /μm50-70
      Zoom ratio10

      NA

      Focal length /mm

      Image height /mm

      0.25

      14

      5

    • Table 2. Optimized structural parameters of far infrared microscopic imaging optical system

      View table

      Table 2. Optimized structural parameters of far infrared microscopic imaging optical system

      SurfaceRadius of curvature /mmInterval /μmGlass

      OBJ

      STO

      2

      3

      4

      5

      6

      7

      8

      9

      10

      11

      IMA

      -19.081

      -15.828

      -13.729

      -16.499

      -11.389

      -14.988

      9.958

      9.945

      -58.684

      118.289

      155

      2.002

      2.219

      2.229

      3.624

      5.575

      3.003

      2.430

      4.253

      4.663

      5.151

      4.853

      Silicon

      Silicon

      Silicon

      Silicon

      Silicon

    • Table 3. Cool reflection characteristic parameters of optical element surface

      View table

      Table 3. Cool reflection characteristic parameters of optical element surface

      SurfaceYNI

      1

      2

      3

      4

      5

      6

      7

      8

      9

      10

      11

      0.09694

      -0.70972

      -1.69917

      -1.66539

      -1.73224

      -1.82608

      -1.47518

      2.19516

      -0.05209

      -0.61923

      -0.29893

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    Yue Wang, Aiyun Liu, Wangzhou Shi, Gujin Hu, Chixian Liu, Changyi Pan, Yufeng Shan, Yi Zhang, Huiyong Deng, Ning Dai. Design and Simulation of Far Infrared Microscopic Imaging Optical Systems[J]. Laser & Optoelectronics Progress, 2022, 59(11): 1122005

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    Paper Information

    Category: Optical Design and Fabrication

    Received: Aug. 12, 2021

    Accepted: Sep. 8, 2021

    Published Online: Jun. 9, 2022

    The Author Email: Hu Gujin (hugj@mail.sitp.ac.cn), Deng Huiyong (hydeng@mail.sitp.ac.cn)

    DOI:10.3788/LOP202259.1122005

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