Optics and Precision Engineering, Volume. 30, Issue 19, 2362(2022)
Effect of air squeeze film damping in multi-mode atomic force microscopy
Figures & Tables(7)
Fig. 5. Approach curves of 3 N/m cantilever in fundamental resonance mode
Fig. 6. Approach curve of 3 N/m cantilever in second-order resonant mode
Table 1. Test data of quality factor with squeeze film damping
View tableView in ArticleTable 1. Test data of quality factor with squeeze film damping
Serial number Voltage of theinner wall/V Voltage of theouter wall/V Q
（the first-order resonant mode）
Q
（the second-order resonant mode）
Distance between the tip and the sample/μm 1 0 120 169.62 537.71 2.00 2 0 80 170.02 537.87 2.14 3 0 40 170.36 537.79 2.48 4 0 0 176.34 537.81 3.03 5 0 -40 179.92 537.79 3.44 6 0 -80 181.13 537.62 3.86 7 0 -120 184.02 537.80 4.42 8 0 -160 185.75 537.54 5.20 9 0 -198 189.23 537.12 5.93 10 40 -198 190.17 536.58 6.74 11 80 -198 192.43 536.87 7.57 12 120 -198 194.77 537.56 8.40 13 160 -198 195.27 537.27 9.05 14 198 -198 197.17 536.92 10.0 15 下方无试样 206.82 537.88 ≫20
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Yang ZHAO, Qiangxian HUANG. Effect of air squeeze film damping in multi-mode atomic force microscopy[J]. Optics and Precision Engineering, 2022, 30(19): 2362
Paper Information
Category: Micro/Nano Technology and Fine Mechanics
Received: Mar. 16, 2022
Accepted: --
Published Online: Oct. 27, 2022
The Author Email: ZHAO Yang (zhaoyang@ahjzu.edu.cn)
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