Optics and Precision Engineering, Volume. 18, Issue 9, 2022(2010)
Design of resonant MEMS temperature sensor
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MA Hong-yu, HUANG Qing-an, QIN Ming. Design of resonant MEMS temperature sensor[J]. Optics and Precision Engineering, 2010, 18(9): 2022
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Received: Mar. 8, 2010
Accepted: --
Published Online: Dec. 7, 2010
The Author Email: Hong-yu MA (maccaboy@seu.edu.cn)
CSTR:32186.14.
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