Fig. 1. Structure of relief grating on beam incident surface

Fig. 2. Diamond turning structure. (a) Typical diamond turning structure; (b) diamond turning structure for linear marking; (c) structure for cutting straight grooves on a curved substrate

Fig. 3. Production flow chart of convex blazed grating

Fig. 4. Optical path of holographic convex grating lithography

Fig. 5. Holographic exposure light path

Fig. 6. Symmetrical holographic exposure light path

Fig. 7. Development monitoring device

Fig. 8. Principle of segmented etching method. (a) Position map of convex grating mask substrate; (b) schematic diagram of segmented etching

Fig. 9. Ion beam etching scanning platform

Fig. 10. Ion beam etching model