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Journal of the Chinese Ceramic Society, Volume. 52, Issue 10, 3273(2024)

Low Temperature Bonding of β-Ga2O3/SiO2 by Oxygen Plasma Activation

MA Xu1...2, MU Wenxiang1,2,*, HOU Tong1, DONG Yue1, YU Bowen1, LI Yang1, and JIA Zhitai13 |Show fewer author(s)
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    MA Xu, MU Wenxiang, HOU Tong, DONG Yue, YU Bowen, LI Yang, JIA Zhitai. Low Temperature Bonding of β-Ga2O3/SiO2 by Oxygen Plasma Activation[J]. Journal of the Chinese Ceramic Society, 2024, 52(10): 3273

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    Paper Information

    Received: Apr. 7, 2024

    Accepted: --

    Published Online: Nov. 14, 2024

    The Author Email: Wenxiang MU (mwx@sdu.edu.cn)

    DOI:10.14062/j.issn.0454-5648.20240259

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology