Chinese Optics Letters, Volume. 3, Issue 12, 12712(2005)
Non-coplanar multi-beam interference produced by one triangular pyramid for fabricating photonic crystals
A method for fabricating three-dimensional (3D) photonic crystals (PhCs) easily and simply, by using a visible light (~532 nm) to pass one triangular pyramid to form non-coplanar multi-beam interference, named laser interference etching technique, is reported. In the experiment, we exposed a 9-μm-thick photo-resist on the silicon substrate with exposure intensities of 150, 180, and 220 mJ/cm2, and produced the periodical nanostructures. Through varying a common angle in the triangular pyramid, other interference patterns can be obtained to fabricate various PhCs.
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Wanghua Xiang, Jie Liang, Guizhong Zhang, Lijun Wu, K. S. Wong, G. K. L. Wong. Non-coplanar multi-beam interference produced by one triangular pyramid for fabricating photonic crystals[J]. Chinese Optics Letters, 2005, 3(12): 12712