Optics and Precision Engineering, Volume. 21, Issue 3, 664(2013)
Nano-CMM stage with zero Abbe error and its error analysis
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HUANG Qiang-xian, YU Fu-ling, GONG Er-min, WANG Chen-chen, FEI Ye-tai. Nano-CMM stage with zero Abbe error and its error analysis[J]. Optics and Precision Engineering, 2013, 21(3): 664
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Received: Dec. 4, 2012
Accepted: --
Published Online: Apr. 8, 2013
The Author Email: Qiang-xian HUANG (huangqx@hfut.edu.cn)
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