Optics and Precision Engineering, Volume. 24, Issue 12, 2975(2016)

Error analysis of ion beam figuring for fabrication of continuous phase plates with small feature structures

XU Ming-jin... DAI Yi-fan*, XIE Xu-hui and ZHOU Lin |Show fewer author(s)
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    XU Ming-jin, DAI Yi-fan, XIE Xu-hui, ZHOU Lin. Error analysis of ion beam figuring for fabrication of continuous phase plates with small feature structures[J]. Optics and Precision Engineering, 2016, 24(12): 2975

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    Received: Oct. 8, 2016

    Accepted: --

    Published Online: Jan. 23, 2017

    The Author Email: Yi-fan DAI (dyf@nudt.edu.com)

    DOI:10.3788/ope.20162412.2975

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