Optics and Precision Engineering, Volume. 24, Issue 12, 2975(2016)
Error analysis of ion beam figuring for fabrication of continuous phase plates with small feature structures
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XU Ming-jin, DAI Yi-fan, XIE Xu-hui, ZHOU Lin. Error analysis of ion beam figuring for fabrication of continuous phase plates with small feature structures[J]. Optics and Precision Engineering, 2016, 24(12): 2975
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Received: Oct. 8, 2016
Accepted: --
Published Online: Jan. 23, 2017
The Author Email: Yi-fan DAI (dyf@nudt.edu.com)