Chinese Optics Letters, Volume. 16, Issue 10, 101402(2018)
Thermal process of silica glass microchannels fabricated by femtosecond laser ablation
Figures & Tables(6)
Fig. 1. Schematic diagram of the experimental setup. M, mirror; ND, neutral density attenuator.
Fig. 2. (a) Morphology of the microchannel measured by the LCM; (b) cross-section profile.
Fig. 4. Trend of width, depth, and roughness of microchannels varies with the temperature.
Fig. 5. SEM images of 15 mW heating at different temperatures and at an incubation time for 1 h. (a) Room temperature; (b) 400°C; (c) 800°C; the upper right corner is the selected area, and the lower right corner is the counting result.
Fig. 6. Relationship between the change rate of the morphology and the incubation time when the work piece is heated to 800°C.
Tools
Get Citation
Copy Citation Text
Xiaoyan Sun, Dongmei Cui, Youwang Hu, Dongkai Chu, Guowei Chen, Jinlong Yu, Jianhang Zhou, Ji’an Duan. Thermal process of silica glass microchannels fabricated by femtosecond laser ablation[J]. Chinese Optics Letters, 2018, 16(10): 101402
Paper Information
Category: Lasers and Laser Optics
Received: Jun. 5, 2018
Accepted: Aug. 30, 2018
Published Online: Oct. 12, 2018
The Author Email: Youwang Hu (huyw@csu.edu.cn)
© Copyright 2018-2021 | Chinese Laser Press.
All Rights Reserved 沪ICP备15018463号-20