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Optics and Precision Engineering, Volume. 15, Issue 7, 1044(2007)

Structural design and mechanism analysis of a valveless piezoelectric pump with single bimorph and double chambers

[in Chinese]1,2, [in Chinese]3, [in Chinese]3, [in Chinese]3, and [in Chinese]2
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  • 1[in Chinese]
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    [1] [1] LI H Q,RIBERTS D C,STEYNJ L,et al..A high frequency high flow rate piezoelectrically driven MEMS micropump[C].Proceeding IEEE Solid State Sensors and Actuators Workshop Hilton Head,2000.

    CLP Journals

    [1] JIANG Hong-yuan, YANG Hu-kun, AO Hong-rui, RAMOS Antonio. Theoretical model and experiments for TWEO pumping microflow[J]. Optics and Precision Engineering, 2009, 17(5): 1093

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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Structural design and mechanism analysis of a valveless piezoelectric pump with single bimorph and double chambers[J]. Optics and Precision Engineering, 2007, 15(7): 1044

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    Paper Information

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    Received: Jan. 8, 2007

    Accepted: --

    Published Online: Feb. 18, 2008

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    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology