3D Surface Reconstruction of Laser Damage of Optical Element Based on Wavelet Transform

Chenxuan Yin; Yunfeng Ma; Wang Cheng; Guangyan Guo; Xuebo Yang; Fang Bai; Can Cao; Jiawei Zhou; Lü Weizhi; Yongjian Zhu; Lifen Liao; Zhongwei Fan

doi:10.3788/LOP222777

Laser & Optoelectronics Progress, Volume. 60, Issue 8, 0811032(2023)

3D Surface Reconstruction of Laser Damage of Optical Element Based on Wavelet Transform

Chenxuan Yin^1,2, Yunfeng Ma^1,2、*, Wang Cheng¹, Guangyan Guo¹, Xuebo Yang¹, Fang Bai¹, Can Cao¹, Jiawei Zhou³, Lü Weizhi^1,2, Yongjian Zhu^1,2, Lifen Liao¹, and Zhongwei Fan¹

Author Affiliations

¹Department of Optical Engineering Research, Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100094, China

²School of Optoelectronics, University of Chinese Academy of Sciences, Beijing 100094, China

³College of Optical and Electronic Technology, China Jiliang University, Hangzhou 310018, Zhejiang, China

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Figures & Tables(11)

Fig. 1. Experimental setup for micro imaging on-line detection

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Fig. 2. Picture of an image acquisition part

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Fig. 3. Principle of three level decomposition

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Fig. 4. Flow chart of the proposed reconstruction algorithm

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Fig. 5. Image sequence. (a) The 1st image; (b) the 10th image; (c) the 20th image; (d) the 31st image; (e) the 40th image

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Fig. 6. Curves of focus evaluation functions

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Fig. 7. Damage morphology of the sample. (a) Focus on the top; (b) focus on the bottom

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Fig. 8. Top view of 3D point cloud map. (a) Brenner; (b) Tenengrad; (c) Eav; (d) Variance; (e) Energy; (f) Wave1; (g) Wave2; (h) Wave3; (i) Wave3D

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Fig. 9. Comparison of reconstruction results. (a) Brenner; (b) Tenengrad; (c) Eav; (d) Variance; (e) Energy; (f) Wave1; (g) Wave2; (h) Wave3; (i) Wave3D

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Table 1. Performance index of the focus evaluation function

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Table 1. Performance index of the focus evaluation function

Algorithm	Q_R	Q_F	Q_S
F_Brenner	2.110	0.340	0.080
F_Tenengrad	1.953	0.338	0.060
F_Eav	1.751	0.328	0.049
F_Variance	1.419	0.305	0.061
F_Energy	2.550	0.351	0.117
F_Wave1	1.746	0.330	0.044
F_Wave2	1.777	0.332	0.042
F_Wave3	2.563	0.346	0.116
F_Wave3D	2.608	0.356	0.131

Table 2. Calculation results of maximum depth
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Table 2. Calculation results of maximum depth
Algorithm Depth /μm Error /%
F_Brenner 191.7 14.56
F_Tenengrad 192.2 14.95
F_Eav 190.7 14.06
F_Variance 193.1 15.49
F_Energy 193.8 15.91
F_Wave1 186.8 11.72
F_Wave2 187.6 12.20
F_Wave3 162.0 3.11
F_Wave3D 169.8 1.56

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Chenxuan Yin, Yunfeng Ma, Wang Cheng, Guangyan Guo, Xuebo Yang, Fang Bai, Can Cao, Jiawei Zhou, Lü Weizhi, Yongjian Zhu, Lifen Liao, Zhongwei Fan. 3D Surface Reconstruction of Laser Damage of Optical Element Based on Wavelet Transform[J]. Laser & Optoelectronics Progress, 2023, 60(8): 0811032

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