Acta Optica Sinica, Volume. 22, Issue 3, 344(2002)
Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique
References(1)
[1] [1] Moore D F, Syms R R. Recent developments in micromachined silicon. Electron. and Commun. Engng. J., 1999, :261～270
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Chen Min, Liu Xu, Li Haifeng. Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique[J]. Acta Optica Sinica, 2002, 22(3): 344
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