Acta Optica Sinica, Volume. 22, Issue 3, 344(2002)
Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique
A new method is proposed to build a micromachined tunable optical filter array on glass base in visible band. The analysis result based on finite element shows that the optical performance is strongly influenced by the curved 3 D surface of the suspended electrostaticly driving layer.
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Chen Min, Liu Xu, Li Haifeng. Finite Element Analysis of Tunable Optical Filter Array Based on Microstructure Technique[J]. Acta Optica Sinica, 2002, 22(3): 344
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