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Journal of the European Optical Society-Rapid Publications, Volume. 19, Issue 1, 2023004(2023)

Wide band UV/Vis/NIR blazed-binary reflective gratings for spectro-imagers: two lithographic technologies investigation

Mane-Si Laure Lee1,*... Julie Cholet1, Anne Delboulbé1, Raphaël Guillemet1, Brigitte Loiseaux1, Patrick Garabédian1, Thomas Flügel-Paul2, Tino Benkenstein2, Susann Sadlowski2, Nicolas Tetaz3, Roman Windpassinger4 and Ana Baselga Mateo4 |Show fewer author(s)
Author Affiliations
  • 1Thales Research & Technology, 1 Avenue Augustin Fresnel, 91767 Palaiseau, France
  • 2Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Strasse 7, 07745 Jena, Germany
  • 3Thales Alenia Space, 5 Allée des Gabians, BP 99, 06156 Cannes la Bocca Cedex, France
  • 4European Space Research and Technology Centre, Postbus 299, 2200 AG Noordwijk, The Netherlands
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    [1] N. Tetaz, C. Ruilier, M. Taccola, T. Viard, M.-S.L. Lee Bouhours, B. Loiseaux, G. Lehoucq. Advanced large FOV UV/VIS/NIR/SWIR spectrometers for future earth observation instruments. Proc. SPIE, 10563, 1056333(2017).

    [2] S.M. Ebstein. Achromatic diffractive optical elements. SPIE, 2404, 211-216(2001).

    [3] B.H. Kleemann, M. Seesselberg, J. Ruoff. Design concepts for broadband high-efficiency DOEs. J. Eur. Opt. Soc., 3, 08015(2008).

    [4] O. Sandfuchs, M. Kraus, R. Brunner. Structured metal double-blazed dispersion grating for broadband spectral efficiency achromatization. J. Opt. Soc. Am. A, 37, 1369-1380(2020).

    [5] P. Mouroulis, S.W. Wilson, P.D. Maker, R.E. Muller. Convex grating types for concentric imaging spectrometers. Appl. Opt., 37, p7200-7208(1998).

    [6] B. Van Gorp, P. Mouroulis, D.W. Wilson, R.O. Green. Design of the compact wide swath imaging spectrometer (CWIS). Proc. SPIE, 9222, 92220C(2014).

    [7] C. Sauvan, P. Lalanne, M.-S.L. Lee. Broadband blazing with artificial dielectrics. Opt. Lett., 29, 1593-1595(2004).

    [8] C. Ribot, M.-S.L. Lee, S. Collin, S. Bansropun, P. Plouhinec, D. Thenot, S. Cassette, B. Loiseaux, P. Lalanne. Broadband and efficient diffraction. Adv. Opt. Mat., 1, p489-493(2013).

    [9] F. Burmeister, T. Flügel-Paul, U.D. Zeitner, M.-S.L. Lee-Bouhours, G. Lehoucq, J. Cholet, B. Loiseaux, N. Tetaz, R. Windpassinger, M. Taccola. Binary blazed reflection grating for UV/VIS/NIR/SWIR spectral range. Proc. SPIE, 11180, 111801J(2019).

    [10] M. Erdmann, E.-B. Kley, U. Zeitner. Development of a large blazed transmission grating by effective binary index modulation for the GAIA radial velocity spectrometer. Proc. SPIE, 105650, 105651N(2017).

    [11] W. Stork, N. Streibl, H. Haidner, P. Kipfer. Artificial distributed-index media fabricated by zero-order gratings. Opt. Let., 16, 1921-1923(1991).

    [12] M. Heusinger, M. Banasch, T. Flügel-Paul, U.D. Zeitner. Investigation and optimization of Rowland ghosts in high efficiency spectrometer gratings fabricated by e-beam lithography. Proc. SPIE, 9759, 97590A(2016).

    [13] D.W. Wilson, P.D. Maker, R.E. Muller, P.Z. Mouroulis, J. Backlund. Recent advances in blazed grating fabrication by electron-beam lithography. Proc. SPIE, 5173, 51730E(2003).

    [14] D.W. Wilson, R.E. Muller, P.M. Echternach, J.P. Backlund. Electron-beam lithography for micro and nano-optical applications. Proc. SPIE, 5720, 68-77(2005).

    [15] F. Zamkotsian, I. Zhurminsky, P. Lanzoni, N. Tchoubaklian, F. Lütolf, M. Schnieper, C. Schneider, S. Fricke, M. Fouchier, M. Zerrad, C. Amra, V. Costes, J. Loesel. Blazed gratings on convex substrates for high throughput spectrographs for Earth and Universe observation. Proc. SPIE, 11852, 118520N(2021).

    [16] T. Flügel-Paul, C. Rothhardt, T. Benkenstein, K. Grabowski, S. Risse, R. Eberhardt, B. Guldimann, U.D. Zeitner. All-dielectric Prism-Grating-Prism component realized by direct hydrophilic bonding technology for optical applications in space. Proc. SPIE, 11180, 1118014(2018).

    [17] P. Birckigt, K. Grabowski, G. Leibeling, T. Flügel-Paul, M. Heusinger, H. Ouslimani, S. Risse. Effects of static load and residual stress on fused silica direct bonding interface properties. Appl. Phys. A, 127, 938(2021).

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    Mane-Si Laure Lee, Julie Cholet, Anne Delboulbé, Raphaël Guillemet, Brigitte Loiseaux, Patrick Garabédian, Thomas Flügel-Paul, Tino Benkenstein, Susann Sadlowski, Nicolas Tetaz, Roman Windpassinger, Ana Baselga Mateo. Wide band UV/Vis/NIR blazed-binary reflective gratings for spectro-imagers: two lithographic technologies investigation[J]. Journal of the European Optical Society-Rapid Publications, 2023, 19(1): 2023004

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    Paper Information

    Category: Research Articles

    Received: Feb. 1, 2022

    Accepted: Jan. 10, 2023

    Published Online: Aug. 31, 2023

    The Author Email: Lee Mane-Si Laure (mane-si-laure.lee@thalesgroup.com)

    DOI:10.1051/jeos/2023004

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology