Optics and Precision Engineering, Volume. 16, Issue 8, 1416(2008)

Borosilicate glass film bending by CO2 CW-laser

WU Dong-jiang1,*... NIU Fang-yong1, LIU Shuang1, MA Guang-yi1, ZHU Yong2 and WANG Xu-yue1 |Show fewer author(s)
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    References(10)

    [4] [4] FRVHAUF J,GARTHER E,JANSCH E,et al..Silicon as a plastic material[J].J.Micromesh.Microeng.,1999(9):305-312

    [5] [5] FRVHAUF J,GARTHER E,JANSCH E.Aspects of the plastic deformation of silicon-prerequisites for the reshaping of silicon microelements[J].Appl.Phys.,1999,68:673-679

    [6] [6] LOSCHNER U,EXNER H,GARTNER U,et al..Laser bending of silicon[J].SPIE,2003,4977:86-93

    [7] [7] GARTHER E,FRVHAUF J,LOSCHNER U,et al..Laser bending of etched silicon microstructure[J].Micro system Technologies,2001(7):23-26

    [8] [8] EXNER H,LOSCHNER U.Contactless laser bending of silicon microstructures[J].SPIE,2003,5116:383-392

    [9] [9] ZHANG R X,XU X F.Microscale bending of brittle materials using pulsed and CW lasers[J].SPIE,2002,4637:291-296

    [10] [10] ZHANG R X,XU X F.High precision micro scale bending by pulsed and CW lasers[J].Transactions of the ASME,2003,125(8):512-518

    [11] [11] ZHANG R X,XU X F.Finite element analysis of pulsed laser bending:the effect of melting and solidification[J].J.Appl.Mechanics,2004,71(5):321-326

    [12] [12] ZHANG R X,XU X F.Laser bending for high-precision curvature adjustment of micro cantilevers[J].Appl.Phys.Lett.,2005,86(021114):1-3

    [13] [13] TAM A C,POON C C,LINDEN C.Laser bending of ceramics and application to manufacture magnetic head sliders in disk drives[J].Analytical Sciences,2001,17(Special Issue):419-422

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    WU Dong-jiang, NIU Fang-yong, LIU Shuang, MA Guang-yi, ZHU Yong, WANG Xu-yue. Borosilicate glass film bending by CO2 CW-laser[J]. Optics and Precision Engineering, 2008, 16(8): 1416

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    Paper Information

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    Received: Nov. 20, 2007

    Accepted: --

    Published Online: Feb. 28, 2010

    The Author Email: Dong-jiang WU (djwudut@dlut.edu.cn)

    DOI:

    CSTR:32186.14.

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