Fig. 1. Principle and output characteristics of the F-P cavity. (a) Working principle of the F-P cavity; (b) output characteristics of the F-P cavity^[7]

Fig. 2. Schematic diagram of the bulk micro-machined filter^[8]

Fig. 3. Schematic diagram of surface micro-machined filter^[8]

Fig. 4. Structure of the DBR^[12]

Fig. 5. Schematic diagram of MEMS FPTF for adaptive multispectral thermal imaging^[13]

Fig. 6. Cross-sectional of MEMS FPTF used for hyperspectral imaging air spacer^[14]

Fig. 7. Cross-sectional views of single- and double-membrane FPIs. (a) Cross-sectional view of single-membrane FPI; (b) cross-sectional view of double-membrane FP^[15]

Fig. 8. Cross-sectional of 900-1650 nm broadband MEMS FPTF^[16]

Fig. 9. F-P filter with sub-wavelength structure mirror^[22]

Fig. 10. Cross-sectional schematic diagram of MEMS FPTF^[17]

Fig. 11. Sectional view of tunable dual-frequency MEMS F-P filter^[23]

Fig. 12. Equipment of an IR gas analyzer with µFPF^[25]

Fig. 13. Schematic diagram of the new μFP filter chip design^[26]

Fig. 14. Overall structure of the MEMS FPI device^[29]

Fig. 15. Microstructure diagram of the reflector^[30]

Fig. 16. Monolithically integrated FPI on photodiode^[31]

Fig. 17. Structure of the polysilicon-silicon nitride release Bragg reflector^[33]

Fig. 18. Structure of the MEMS Fabry-Perot interferometer^[35]

Fig. 19. Structure of MEMS FPI mirror and actuator electrodes^[36]

Fig. 20. Electron micrographs of F-P based devices^[8]

Fig. 21. Schematic diagram of simplified MEMS tunable F-P interferometer filter structure^[40]

Fig. 22. Schematic diagram of MEMS F-P filter^[41]

Fig. 23. Microbridge structure diagram. (a) X-arm structure; (b) +circular-arm structure; (c) L-arm structure^[44]

Fig. 24. Structural of four bridge decks. (a) Holeless bridge deck; (b) round hole bridge deck; (c) square hole bridge deck;(d) diamond-hole bridge deck^[45]