Infrared spectroscopy detection provides a reliable and stable method of analysis. Micro electro mechanical system (MEMS) Fabry-Perot (F-P) tunable filters are the core components of instruments, such as infrared spectrometers, mobile phone camera modules, portable high spectral imagers, and remote sensing devices. Traditional infrared analysis systems and spectrometers are bulky, power-consuming, and expensive. Due to their large size and power consumption, they are not suitable for miniaturized devices. Compared with traditional types of filters, MEMS F-P tunable filters have the advantages of small size, high resolution, easy integration, and low power consumption. This article summarizes the progress made in the research on MEMS F-P tunable filters in China and other countries in recent years and discusses their wavelength tuning range, spectral resolution and aperture size, and the complexity and cost of manufacturing. Finally, the future development trends and application prospects of MEMS F-P filters are prospected, and these provide a reference for future research on MEMS F-P tunable filters.