Chinese Journal of Quantum Electronics, Volume. 24, Issue 3, 357(2007)

Analysis of scanning technology of PCB laser projection imaging

Qing-hua LIN*... jing LI Wen and Jin-yun ZHOU |Show fewer author(s)
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    References(7)

    [1] [1] Jain K. A novel high-resolution,large-field scan-and-repeat projection lithography system [C].Proc. of SPIEOptical/Laser Microlithography IV,1991,1463: 666-677.

    [2] [2] Buckley J,Rubin D. Step and san: a system overview of a new lithography tool [C].Proc. of SPIE-Optical/Laser Microlithography Ⅱ,1989,1088: 424-433.

    [3] [3] Jain K. High-speed,high-resolution,large-area exposure system for PCB patterning [J].Printed Circuit Fabrication,1997,20(5): 34-41.

    [4] [4] Jeong J H,Sim Y S,Sohn H,Lee E S. Step and repeat UV-nanoimprint lithography using a large area stamp [C].SPIE,2005,5751(1): 227-235.

    [5] [5] Jain K,Zemel M,Klosner M. Large-area,high-resolution lithography and photoablation systems for microelectronics and optoelectronics fabrication [J].Proc. IEEE,2002,90: 1681-1688.

    [6] [6] Jain K,Zemel M,Klosner M. Large-area excimer laser lithography and photoablation systems [J].Microlithography World,2002,8: 8-10.

    [7] [7] Zemel M,Nunes C,Jain K. X-Y scaling compensation technology for fine-line PCB imaging with high-precision alignment [C].IPC Printed Circuit Expo,Proc. of Technical Conf,2002,3: 26-28.

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    LIN Qing-hua, LI Wen jing, ZHOU Jin-yun. Analysis of scanning technology of PCB laser projection imaging[J]. Chinese Journal of Quantum Electronics, 2007, 24(3): 357

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    Paper Information

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    Received: Sep. 22, 2006

    Accepted: --

    Published Online: Jun. 7, 2010

    The Author Email: Qing-hua LIN (Linqh803@yahoo.com.cn)

    DOI:

    CSTR:32186.14.

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