Acta Optica Sinica, Volume. 40, Issue 14, 1431002(2020)
Study on Stress in Si-Doped Al Thin Films Prepared by Magnetron Co-Sputtering
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Jingtao Zhu, Tao Zhou, Jie Zhu, Jiaoling Zhao, Hangyu Zhu. Study on Stress in Si-Doped Al Thin Films Prepared by Magnetron Co-Sputtering[J]. Acta Optica Sinica, 2020, 40(14): 1431002
Category: Thin Films
Received: Feb. 24, 2020
Accepted: Apr. 13, 2020
Published Online: Jul. 23, 2020
The Author Email: Zhu Jie (jzhu008@tongji.edu.cn)