Fig. 1. Schematic of illumination system of step-and-scan lithography tools

Fig. 2. Diagram of illumination mode development state^[19]

Fig. 3. Schematic of different illumination modes by zoom Fourier transform lens group and axicon lens group^[21]

Fig. 4. Schematic of pupil shaping based on micro-mirror array^[25]

Fig. 5. Schematic of pupil compensation technology. (a) Schematic of filter^[26]; (b) schematic of compensating finger^[27]

Fig. 6. Schematic of intensity distribution of top-Gaussian illumination optical field^[29]

Fig. 7. Schematic of homogenizing principle of integrator rod

Fig. 8. Schematic of working principle of illumination homogenization unit with MLAs^[32]

Fig. 9. Schematic of finger array uniformity corrector^[39]

Fig. 10. Schematic of generally used polarized illumination modes under traditional illumination mode^[41]