Laser & Optoelectronics Progress, Volume. 59, Issue 9, 0922011(2022)
Research Progress on Illumination System Technology of Step-and-Scan Projection Lithography Tools
Lithography technology is the core technology of manufacturing integrated circuits. Lithography tools is the core equipment of manufacturing integrated circuits, and illumination system is one of the core components of lithography machine. The working principle of the illumination system of deep ultra-violet step-and-scan projection lithography tools is introduced. The pupil shaping technology, homogenization technology, and polarization illumination technology are reviewed and analyzed. The relevant technical principles and implementation methods are summarized.
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Jiahong Liu, Fang Zhang, Huijie Huang. Research Progress on Illumination System Technology of Step-and-Scan Projection Lithography Tools[J]. Laser & Optoelectronics Progress, 2022, 59(9): 0922011
Category: Optical Design and Fabrication
Received: Mar. 8, 2022
Accepted: Apr. 2, 2022
Published Online: May. 10, 2022
The Author Email: Zhang Fang (zhangfang@siom.ac.cn), Huang Huijie (huanghuijie@siom.ac.cn)