Micro-optical technology and its developmen

Infrared and Laser Engineering, Volume. 30, Issue 4, 235(2001)

[in Chinese]^*, [in Chinese], and [in Chinese]

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[in Chinese]

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References(3)

[1] [1] Parriaux O M. Microoptical Technologies for Measurement, Sensors, and Microsystems[A]. SPIE[C]. 1997, 3099.33-57.

[2] [2] Feldman M R. Microoptics Integration and Assembles[A]. SPIE[C]. 1998, 3289.9-72.

[3] [3] ManZ A, Becker H. Microsystem Technology in Chemistry and Life Sciences[M]. Springer. 1999. 10-30.

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[in Chinese], [in Chinese], [in Chinese]. Micro-optical technology and its developmen[J]. Infrared and Laser Engineering, 2001, 30(4): 235

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Received: Jan. 2, 2001

Accepted: May. 4, 2001

Published Online: Apr. 28, 2006

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