Optics and Precision Engineering, Volume. 16, Issue 4, 682(2008)
Miero-cantilever thermal infrared detector with carbon nanotubes
[1] [1] SENESAC J L,CORBEIL S,RAJAC N V,et al..IR imaging using uncooled micro-cantilever detectors[J].Ultramicroscopy,2003,97(1-4):451-458.
[2] [2] KIM J K,HAN C H.A new uncooled thermal infrared detector using silicon diode[J].Sensors and Actuators A,2001,89:22-27.
[3] [3] VIDIC A,THEN D,ZIEGLER C.A new cantilever system for gas and liquid sensing[J].Ultramicroscopy,2003,97:407-416.
[8] [8] ANTONI R.Infrared detectors:an overview[J].Infrared Physics & Technology,2002,43(3-5):187-210.
[9] [9] YANG J L,ONO T,ESASHI M.Mechanical behavior of ultrathin microcantilever[J].Sensors and Actuators A,2000,82(1-3):102-107.
[10] [10] FANG W,TSAI H,LO C.Determining thermal expansion coefficients of thin films using micromachined cantilevers[J].Sensors and ActuatorsA,1999,77(1):21-27.
[11] [11] WALTER L,KARL K,HERMANN S.Absorbing layers for thermal infrared detectors[J].Sensors and Actuators A,1992,34(1-3):243-248.
[12] [12] LIU Y F,SHEN Z M,KIYOSHI Y,et al..Study of preparation and structures of the activated carbon nanotubes[J].New Carbon Materials,2004,19(3):197-203.
Get Citation
Copy Citation Text
[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Miero-cantilever thermal infrared detector with carbon nanotubes[J]. Optics and Precision Engineering, 2008, 16(4): 682