INFRARED, Volume. 43, Issue 10, 16(2022)

Study on Cleaning Process Before Passivation of InSb Infrared Detectors

Yu CHENG
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    CHENG Yu. Study on Cleaning Process Before Passivation of InSb Infrared Detectors[J]. INFRARED, 2022, 43(10): 16

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    Paper Information

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    Received: May. 18, 2022

    Accepted: --

    Published Online: Feb. 20, 2023

    The Author Email:

    DOI:10.3969/j.issn.1672-8785.2022.10.003

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