Acta Optica Sinica, Volume. 41, Issue 17, 1704001(2021)

Design and Optimization of Double-Wave-Peak Response CMOS Single-Photon Detector

Weiyu Zhang, Yang Wang, and Xiangliang Jin*
Author Affiliations
  • School of Physics and Electronics, Hunan Normal University, Changsha, Hunan 410081, China
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    Figures & Tables(13)
    Three-dimensional structure of double-wave-peak SPAD
    Cross section of double-wave-peak SPAD
    Electric field distribution of double-wave-peak SPAD
    Impact ionization distribution of double-wave-peak SPAD
    Photon absorption rate of double-wave-peak SPAD
    Current density distribution of double-wave-peak SPAD
    Test platform of double-wave-peak SPAD
    Schematic and layout patterns of double-wave-peak SPAD. (a) Schematic pattern; (b) layout pattern
    Passive quenching circuit of double-wave-peak SPAD
    I-V characteristic curve of double-wave-peak SPAD
    DCR curve of double-wave-peak SPAD
    PDP curve of double-wave-peak SPAD
    • Table 1. Comparison of PDP test data between existed SPADs and proposed SPAD

      View table

      Table 1. Comparison of PDP test data between existed SPADs and proposed SPAD

      Device nameProcessPDP
      SPAD in Ref. [11]0.13 μm CMOS34% (1.7 V@450 nm)
      SPAD in Ref. [12]a new silicon SPAD process40% (20 V@800 nm)
      SPAD in Ref. [13]0.13 μm CMOS32%/29% (3 V@450 nm/670 nm)
      SPAD in Ref. [17]0.18 μm CMOS39% (2.5 V@500 nm)
      Proposed SPAD0.18 μm BCD32%/12% (0.5 V@520 nm/840 nm)
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    Weiyu Zhang, Yang Wang, Xiangliang Jin. Design and Optimization of Double-Wave-Peak Response CMOS Single-Photon Detector[J]. Acta Optica Sinica, 2021, 41(17): 1704001

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    Paper Information

    Category: Detectors

    Received: Feb. 2, 2021

    Accepted: Mar. 23, 2021

    Published Online: Sep. 3, 2021

    The Author Email: Jin Xiangliang (jinxl@hunnu.edu.cn)

    DOI:10.3788/AOS202141.1704001

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