Infrared and Laser Engineering, Volume. 31, Issue 5, 447(2002)
Fabrication of Si-V groove used for fiber array
[3] [3] Murphy E J, Rice T C. Permanent attachment of single mode fiber arrays to wave-guides[J]. J Lightwave Technol, 1985, 1, T-3:795-799.
[4] [4] Edmond J Murphy. Low-loss coupling of multiple fiber arrays to single-mode waveguides[J]. J lightwave technol, 1988, 6(6):862.
[6] [6] Wessels B, Baliga B J. Anisotropic etching of sillicon[J]. IEEE Trans Electron Devices, 1978, ED-25:1375.
[7] [7] Kendall D L. On etching very narrow grooves in silicon[J]. J Appl Phys Lett, 1975, 26:195.
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[in Chinese]. Fabrication of Si-V groove used for fiber array[J]. Infrared and Laser Engineering, 2002, 31(5): 447