[1] [1] ALLEN L N. Progress in ion figuring large optics ［C］.Laser-Induced Damage in Optical Materials: 1994 International Society for Optics and Photonics, 1995: 237-247.

[2] [2] DEMMLER M, ZEUNER M, LUCA A, et al.. Ion beam figuring of silicon aspheres ［J］.SPIE, 2011, 7934: 793416-793416-6.

[3] [3] GREENLEAF A H. Computer-controlled optical surfacing ［C］.1980 Technical Symposium East. International Society for Optics and Photonics, 1980: 41-55.

[4] [4] KANG J, XUAN B, XIE J J.Manufacture technology status of surface modified silicon carbide mirrors ［J］. Chinese Optics, 2013, 6(6): 824-833.(in Chinese)

[5] [5] WANG X. Fabrication of SiC mirror in full aperture with optimized fixed abrasive polishing pad ［J］. Opt. Precision Eng., 2012, 20(10): 2123-2131.(in Chinese)

[6] [6] ZANG F. Computer-controlled chemical mechanical polishing of silicon modification layer on aspheric silicon carbide surface ［J］. Opt. Precision Eng., 2013, 21(12): 3015-3020.(in Chinese)

[7] [7] LI R G, ZHENG L G, ZHANG F, et al.. Computer controlled manufacturing during fine grinding stage of highly steep off-axis asphere with large aperture ［J］. Opt. Precision Eng., 2007, 15(5): 633-639.(in Chinese)

[8] [8] CSAHOK Z, FARKAS Z, MENYHARD M, et al.. Surface morphology development during ion sputtering: roughening or smoothing ［J］. Surface Science, 1996, 364(2): L600-L604.

[9] [9] HAENSEL T, NICKEL A, SCHINDLER A. Ion beam figuring of strongly curved surfaces with a (x, y, z) linear three-axes system ［C］.Optical Fabrication and Testing, Optical Society of America, 2008.

[10] [10] GHIM Y S, YOU S J, RHEE H G, et al.. Ultra-precision surface polishing using ion beam figuring ［C］.6th International Symposium on Advanced Optical Manufacturing and Testing Technologies (AOMATT 2012), International Society for Optics and Photonics, 2012: 84161O-84161O-4.

[11] [11] LIAO W, DAI Y, XIE X, et al.. Corrective capability analysis and machining error control in ion beam figuring of high-precision optical mirrors ［J］. Optical Engineering, 2012, 51(3): 033402-1-8.

[12] [12] LIAO W L, DAI Y F, ZHOU L, et al.. Ion beam figuring for rectangular off-axis aspheric mirrors ［J］. Journal of National University of Defense Technology, 2011, 33(1): 100-104.(in Chinese)

[13] [13] SIGMUND P. Elements of Sputtering Theory ［M］. 2009.

[14] [14] MAKEEV M A, CUERNO R, BARABSI A L. Morphology of ion-sputtered surfaces ［J］. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 2002, 197(3): 185-227.

[15] [15] SIGMUND P. Sputtering by Ion Bombardment Theoretical Concepts ［M］. Berlin: Springer Berlin Heidelberg, 1981.

[16] [16] BROWN K L, TAUTFEST G W. Faraday-cup monitors for high-energy electron beams ［J］. Review of Scientific Instruments, 1956, 27(9): 696-702.