Fig. 1. Schematic diagram of polishing motion process of full-aperture continuous polishing

Fig. 2. Sliding track of local optic point on grooved lap

Fig. 3. Polishing laps with different grooves

Fig. 4. Sliding distance distributions of opitcs polished by different patterned laps

Fig. 5. Surface figures of optics polished by laps with different grooves

Fig. 6. Schematic of quatitative measurement of lap surface shape

Fig. 7. Flowchart for correction of shape error of lap using a small tool

Fig. 8. Lap surface shape by sub-correction process

Fig. 9. Surface figure of optic polished before and after corvection of shape error of polishing pad

Fig. 10. Schematic of characteristic structure of lap surface

Fig. 11. Experimental results for monitoring of lap surface passivation status

Fig. 12. Schematic of full-aperture continuous polishing machine

Fig. 13. Surface figure of polished meter class flat element