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INFRARED, Volume. 41, Issue 12, 18(2020)

Study on Picosecond Laser Dicing Process of Sapphire Substrates

Yi-nan ZHANG1...2,*, De-feng Mo1,2, Si-min HONG1,2, and Xue LI12 |Show fewer author(s)
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    ZHANG Yi-nan, Mo De-feng, HONG Si-min, LI Xue. Study on Picosecond Laser Dicing Process of Sapphire Substrates[J]. INFRARED, 2020, 41(12): 18

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    Received: Aug. 16, 2020

    Accepted: --

    Published Online: Feb. 5, 2021

    The Author Email: Yi-nan ZHANG (666shelley@sina.com)

    DOI:10.3969/j.issn.1672-8785.2020.12.003

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology