Infrared and Laser Engineering, Volume. 46, Issue 11, 1118003(2017)
Application of aspheric technique in immersion lithography lighting system
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Li Meixuan, Wang Li, Dong Lianhe, Zhao Ying. Application of aspheric technique in immersion lithography lighting system[J]. Infrared and Laser Engineering, 2017, 46(11): 1118003
Paper Information
Category: 光学设计及仿真
Received: Mar. 5, 2017
Accepted: Apr. 3, 2017
Published Online: Dec. 26, 2017
The Author Email: Meixuan Li (limeixuannuc@163.com)
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