Optics and Precision Engineering, Volume. 18, Issue 11, 2398(2010)

Silicon tuning gyroscope tuned by negative stiffness effect

YANG Bo*... WANG Shou-rong, LI Kun-yu, ZHU Xi and CAO Hui-liang |Show fewer author(s)
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    References(12)

    [1] [1] SUNG W T, SUNG S K, LEE J Y, et al.. Development of a lateral velocity-controlled MEMS vibratory gyroscope and its performance test[J]. Journal of Micromechanics and Microengineering, 2008, 18:1-13.

    [2] [2] DONG Y, KRAFT M, HEDENSTIERNA N, et al.. Microgyroscope control system using a high-order band-pass continuous-time sigma-delta modulator[J]. Sensor and Actuator A, 2008,145-146:299-305.

    [4] [4] YIN Y, WANG S R, WANG C C, et al.. Driving-mode test of dual-mass MEMS gyroscope[J]. Opt. Precision Eng., 2009,17(6):1355-1360.

    [5] [5] ZHOU B L. Design and Fabrication of Dynamically Tuned Gyroscope[M]. Nanjing: Southeast University Press, 2002. (in Chinese)

    [6] [6] LIU G B, WU J Y, WU Y. Analysis on transient dynamics and error for dynamically tuned gyro[J].Electronics Optics &Control,2008,15(5):79-83.(in Chinese)

    [8] [8] JENKINS L , HOPKINS R E, KUMAR K. Hybrid wafer Gyroscope[P]. United Sates Patent: 6615681B1, 2003.

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    CLP Journals

    [1] CAO Hui-liang, WANG Yu-liang, SHI Yun-bo, SHEN Chong, LI Hong-sheng, LIU Jun, YANG Zhi-cai. Optimization of quadrature error correction method for silicon MEMS gyroscopes[J]. Optics and Precision Engineering, 2016, 24(1): 134

    [2] CAO Hui-liang, LI Hong-sheng, WANG Shou-rong, YANG Bo, HUANG Li-bin. Temperature compensation of monitoring circuit for silicon MEMS gyroscope[J]. Optics and Precision Engineering, 2013, 21(12): 3118

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    YANG Bo, WANG Shou-rong, LI Kun-yu, ZHU Xi, CAO Hui-liang. Silicon tuning gyroscope tuned by negative stiffness effect[J]. Optics and Precision Engineering, 2010, 18(11): 2398

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    Paper Information

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    Received: Feb. 3, 2010

    Accepted: --

    Published Online: Dec. 13, 2010

    The Author Email: Bo YANG (yangbo20022002@163.com)

    DOI:

    CSTR:32186.14.

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