Optics and Precision Engineering, Volume. 18, Issue 11, 2398(2010)
Silicon tuning gyroscope tuned by negative stiffness effect
In order to verify the feasibility of the principle of a silicon tuning gyroscope, the tuning mechanism of the gyroscope, and the oscillation mode and process flows of a silicon rotor were introduced, and the signal detecting circuits and rebalancing control loops of the gyroscope were also researched. Then, a new tuning method which tuned the silicon tuning gyroscope by the negative stiffness effect from a moment meter was proposed. The tuned theoretical formula by negative stiffness effect was deduced, and the polar plate of a capacitor and the disc rotor with an equilibrium ring were designed, simulated and fabricated. Moreover, the interface circuit of sensing capacitance signals, the voltage booster circuit, feedback correcting circuit and the rebalancing control loop were designed. On the basis of above, a prototype of the silicon tuning gyroscope was achieved. Experiment results prove that the new tuning method based on the negative stiffness effect from moment meter is feasible, and the designs of interface circuits and rebalancing control loops are available. The preliminary performance test of the prototype shows that the scale factor is 1.42 mV/((°)/s), scale factor nonlinearity is 2.47% and the maximum rate is ±200 (°)/s, which proves that the feasibility of the proposed tuning method for silicon tuning gyroscopes.
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YANG Bo, WANG Shou-rong, LI Kun-yu, ZHU Xi, CAO Hui-liang. Silicon tuning gyroscope tuned by negative stiffness effect[J]. Optics and Precision Engineering, 2010, 18(11): 2398
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Received: Feb. 3, 2010
Accepted: --
Published Online: Dec. 13, 2010
The Author Email: Bo YANG (yangbo20022002@163.com)
CSTR:32186.14.