Microelectronics, Volume. 53, Issue 5, 924(2023)
Research on Bending Model of Cantilever Beam for MEMS Microwave Power Sensors
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WANG Debo, SUN Haoyu. Research on Bending Model of Cantilever Beam for MEMS Microwave Power Sensors[J]. Microelectronics, 2023, 53(5): 924
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Received: Jan. 14, 2023
Accepted: --
Published Online: Jan. 3, 2024
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