Optics and Precision Engineering, Volume. 26, Issue 8, 1945(2018)

Tolerance assurance of interferometer for optical HCB process

YAO Dong1...2, LI Yu-peng2, ZHAO Ya2, WANG Zhi1, SHA Wei1 and WANG Yong-xian1 |Show fewer author(s)
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    YAO Dong, LI Yu-peng, ZHAO Ya, WANG Zhi, SHA Wei, WANG Yong-xian. Tolerance assurance of interferometer for optical HCB process[J]. Optics and Precision Engineering, 2018, 26(8): 1945

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    Received: Jun. 18, 2018

    Accepted: --

    Published Online: Oct. 2, 2018

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    DOI:10.3788/ope.20182608.1945

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