Optics and Precision Engineering, Volume. 26, Issue 8, 1945(2018)
Tolerance assurance of interferometer for optical HCB process
Space interference measurement system is an important part of gravitational wave detection in space. This paper introduces the composition and working principle of a differential frequency interferometer made of only glass. To address the problem of matching and aligning double coherent beams in differential frequency interferometers, we introduce a method that can guarantee the angular and position tolerance of double frequency laser interferometers; this method is suitable for the hydroxide catalysis bonding assembly process. In the proposed method, an observation system is combined with a microadjustment mechanism. First, the monitoring system measures the relative position of light rays in real time. Next, the microadjustment mechanism adjusts the target device to micron-order resolution along three degrees of freedom, including two-dimensional planar movement and one-dimensional axial rotation. The monitoring and adjustment processes are iterated to achieve high-precision position and angular control of the optical components. Manual adjustments can ensure an angular tolerance and a position tolerance greater than 80 μrad and 85 μm, respectively. This scheme can meet the accuracy requirements of differential frequency laser interferometers and lay the foundation for achieving higher accuracy in the future.
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YAO Dong, LI Yu-peng, ZHAO Ya, WANG Zhi, SHA Wei, WANG Yong-xian. Tolerance assurance of interferometer for optical HCB process[J]. Optics and Precision Engineering, 2018, 26(8): 1945
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Received: Jun. 18, 2018
Accepted: --
Published Online: Oct. 2, 2018
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