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Optics and Precision Engineering, Volume. 19, Issue 1, 161(2011)

Distortion correction for images in planar metrology

SU Cheng-zhi*, WANG En-guo, HAO Jiang-tao, CAO Guo-hua, and XU Hong-ji
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    SU Cheng-zhi, WANG En-guo, HAO Jiang-tao, CAO Guo-hua, XU Hong-ji. Distortion correction for images in planar metrology[J]. Optics and Precision Engineering, 2011, 19(1): 161

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    Paper Information

    Received: Nov. 26, 2009

    Accepted: --

    Published Online: Mar. 28, 2011

    The Author Email: Cheng-zhi SU (chengzhi_su@126.com)

    DOI:

    CSTR:32186.14.

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology