Opto-Electronic Engineering, Volume. 32, Issue 9, 27(2005)
Nonlinearity from difference between transmission coefficients of PBS in laser heterodyne interferometer
[4] [4] Hou W,Wilkening G. Investigation and compensation of the nonlinearity of heterodyne interferometers[J]. Prec Eng,1992,14(2):91-98.
[5] [5] De Freitas JM,Player MA. Importance of rotational beam alignment in the generation of second harmonic errors in laser heterodyne interferometry[J]. Meas Sci Tech,1993,4:1173-1176.
[6] [6] Chien-Ming Wu,John Lawall,Richard D. Deslattes. Heterodyne interferometer with subatomic periodic nonlinearity[J]. Appl Opt,1999,38(19):4089-4094.
[7] [7] Li B,Liang J. Effects of polarization mixing on the dual-wavelength heterodyne interferometer[J]. Appl Opt,1997,36(16): 3668-3772.
[8] [8] S.J.A.G.Cosijns,H. Haitjema,P.H.J. Schellekens. Modeling and verifying nonlinearities in heterodyne displacement interferometry[J]. Precis. Eng,2002,26(4):448-455.
[9] [9] V.G. Badami,S.R. Patterson. A frequency domain method for the measurement of nonlinearity in heterodyne interferometry[J]. Prec Eng,2000,24:41-49.
[10] [10] Attilio Sacconi,Gian Bartolo Picotto,Walter Pasin. The IMGC Calibration Setup for Micro- displacement Actuators[J]. IEEE Transactions on Instrumentation and Measurement,1999,48(2):483-487.
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[in Chinese], [in Chinese], [in Chinese], [in Chinese]. Nonlinearity from difference between transmission coefficients of PBS in laser heterodyne interferometer[J]. Opto-Electronic Engineering, 2005, 32(9): 27