Improved Dual-Frequency On-Line Phase Measuring Profilometry Based on Full-Cycle Equal Phase-Shift Algorithm

Kuang Peng; Yiping Cao; Yingchun Wu

doi:10.3788/AOS201939.0412012

Acta Optica Sinica, Volume. 39, Issue 4, 0412012(2019)

Improved Dual-Frequency On-Line Phase Measuring Profilometry Based on Full-Cycle Equal Phase-Shift Algorithm

Kuang Peng¹, Yiping Cao^2、*, and Yingchun Wu³

¹ Hubei Key Laboratory of Ferro & Piezoelectric Materials and Devices, Faculty of Physics & Electronic Sciences, Hubei University, Wuhan, Hubei 430062, China;

² Department of Opto-Electronics, Sichuan University, Chengdu, Sichuan 610064, China

³ School of Electronic and Information Engineering, Taiyuan University of Science and Technology, Taiyuan, Shanxi 0 30024, China

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Kuang Peng, Yiping Cao, Yingchun Wu. Improved Dual-Frequency On-Line Phase Measuring Profilometry Based on Full-Cycle Equal Phase-Shift Algorithm[J]. Acta Optica Sinica, 2019, 39(4): 0412012

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Paper Information

Category: Instrumentation, Measurement and Metrology

Received: Oct. 22, 2018

Accepted: Dec. 25, 2018

Published Online: May. 10, 2019

The Author Email:

DOI:10.3788/AOS201939.0412012

Topics

laser devices and laser physics

Lasers and Laser Optics

Laser physics

laser manufacturing

Instrumentation, Measurement and Metrology