Fig. 1. Schematic of picosecond laser processing ceramic micro-gear. (a) Schematic of experimental setup; (b) top view of gear

Fig. 2. Influence of laser processing parameters on groove depth and width. (a) Influence of scanning speed and scanning times on groove depth and width; (b) influence of laser power and scanning speed on groove depth and width

Fig. 3. Influence of scanning interval on groove depth and roughness under 50 scanning times

Fig. 4. Picosecond laser processed gear with high precision and SEM of morphologies. (a) Gear sample; (b) laser scanning confocal micrograph of surface quality; (c) SEM side view of gear sample; (d) SEM top view of gear sample

Fig. 5. Gear samples and laser scanning confocal micrograph of surface quality for ceramic helical gears with different tooth thickness and included angle processed by picosecond laser

Fig. 6. SEM of gear meshing with the same modulus, different diameter, and different teeth number