Acta Optica Sinica (Online), Volume. 1, Issue 3, 0314002(2024)

Solution for Optimal Arrangement of Marking Points and Method of Distortion Correction in Off-Axis Aspheric Interferometry (Invited)

Shuo Yan... Songlin Wan**, Hanjie Li, Yichi Han, Zhenqi Niu, Zhen Wu, Qing Lu, Guochang Jiang, Pengcheng Shen and Chaoyang Wei* |Show fewer author(s)
Author Affiliations
  • High Power Laser Element Technology and Engineering Department, Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai 201800, China
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    References(16)

    [6] Hao S F, Zhang J, Yang J F. F/0.78 high order aspheric surface testing with null compensator and mapping distortion correction[J]. Acta Photonica Sinica, 52, 0212004(2023).

    [15] Wyant J C, Creath K. Basic wavefront aberration theory for optical metrology[J]. Applied Optics and Optical Engineering, 11, 28-39(1992).

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    Shuo Yan, Songlin Wan, Hanjie Li, Yichi Han, Zhenqi Niu, Zhen Wu, Qing Lu, Guochang Jiang, Pengcheng Shen, Chaoyang Wei. Solution for Optimal Arrangement of Marking Points and Method of Distortion Correction in Off-Axis Aspheric Interferometry (Invited)[J]. Acta Optica Sinica (Online), 2024, 1(3): 0314002

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    Paper Information

    Category: Applied Optics and Optical Instruments

    Received: Jul. 17, 2024

    Accepted: Sep. 11, 2024

    Published Online: Nov. 8, 2024

    The Author Email: Wan Songlin (songlin_wan@siom.ac.cn), Wei Chaoyang (siomwei@siom.ac.cn)

    DOI:10.3788/AOSOL240439

    CSTR:32394.14.AOSOL240439

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