Acta Optica Sinica, Volume. 41, Issue 1, 0112001(2021)
Progress and Prospect of Optical Freeform Surface Measurement
Fig. 2. ZEISS XENOS commercial CMM system[23]
Fig. 4. Schematic of optical surface measurement with SOC[35]. (a) Measurement principle of SOC; (b) scanning path of SOC
Fig. 5. Schematic of Shark-Hartman wavefront detection[44]
Fig. 6. Schematic of structured light 3D measurement[47]
Fig. 7. Measurement principle of CGH method[70]
Fig. 8. Layout of partial-null compensating interferometric system[92]
Fig. 9. Test principle of Zernike freeform surface in Rochester University[86]
Fig. 10. Principle of MANI system[88]
Fig. 11. Schematic of flexible aberration generator used for compensating freeform surface in Anhui University[91]
Fig. 12. Test principle of ASSI[106]
Fig. 13. Measurement principle of CSSI[110]. (a) Schematic of CSSI system; (b) schematic of circular aperture partition
Fig. 14. Irregular sub-aperture partition of interferograms[119]. (a)(d) Interferograms of biconic surface; (b)(e) resolvable sub-apertures; (c)(f) trimmed sub-apertures of
Fig. 15. Measurement principle of TWI[121]. (a) Optical path layout; (b) interferogram array
Fig. 16. Measurement principle of TWI based on tip/tilt mirror[137]. (a) Optical path layout; (b) interferograms under different angles of tip/tilt mirror
Fig. 17. Layout of common-path TWI system[138]
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Rihong Zhu, Yue Sun, Hua Shen. Progress and Prospect of Optical Freeform Surface Measurement[J]. Acta Optica Sinica, 2021, 41(1): 0112001
Category: Instrumentation, Measurement and Metrology
Received: May. 15, 2020
Accepted: Jul. 6, 2020
Published Online: Aug. 5, 2020
The Author Email: Zhu Rihong (zhurihong@njust.edu.cn), Shen Hua (edward_bayun@163.com)