Acta Optica Sinica, Volume. 41, Issue 1, 0112001(2021)

Progress and Prospect of Optical Freeform Surface Measurement

Rihong Zhu1,2、*, Yue Sun1,2, and Hua Shen1,2、**
Author Affiliations
  • 1School of Electronic and Optical Engineering, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China
  • 2MIIT Key Laboratory of Advanced Solid Laser, Nanjing University of Science and Technology, Nanjing, Jiangsu 210094, China
  • show less
    Figures & Tables(17)
    Typical applications of optical freeform surfaces. (a) AR head-mounted display[7]; (b) off-axis three-mirror system with ultra-wide field of view[20]
    ZEISS XENOS commercial CMM system[23]
    Taylor Hopson's commercial profilometers. (a) PGI Freeform profilometer[27]; (b) LuphoScan profilometer[29]
    Schematic of optical surface measurement with SOC[35]. (a) Measurement principle of SOC; (b) scanning path of SOC
    Schematic of Shark-Hartman wavefront detection[44]
    Schematic of structured light 3D measurement[47]
    Measurement principle of CGH method[70]
    Layout of partial-null compensating interferometric system[92]
    Test principle of Zernike freeform surface in Rochester University[86]
    Principle of MANI system[88]
    Schematic of flexible aberration generator used for compensating freeform surface in Anhui University[91]
    Test principle of ASSI[106]
    Measurement principle of CSSI[110]. (a) Schematic of CSSI system; (b) schematic of circular aperture partition
    Irregular sub-aperture partition of interferograms[119]. (a)(d) Interferograms of biconic surface; (b)(e) resolvable sub-apertures; (c)(f) trimmed sub-apertures of Fig.14(b), (e); (g) ultimate result of sub-aperture partition
    Measurement principle of TWI[121]. (a) Optical path layout; (b) interferogram array
    Measurement principle of TWI based on tip/tilt mirror[137]. (a) Optical path layout; (b) interferograms under different angles of tip/tilt mirror
    Layout of common-path TWI system[138]
    Tools

    Get Citation

    Copy Citation Text

    Rihong Zhu, Yue Sun, Hua Shen. Progress and Prospect of Optical Freeform Surface Measurement[J]. Acta Optica Sinica, 2021, 41(1): 0112001

    Download Citation

    EndNote(RIS)BibTexPlain Text
    Save article for my favorites
    Paper Information

    Category: Instrumentation, Measurement and Metrology

    Received: May. 15, 2020

    Accepted: Jul. 6, 2020

    Published Online: Aug. 5, 2020

    The Author Email: Zhu Rihong (zhurihong@njust.edu.cn), Shen Hua (edward_bayun@163.com)

    DOI:10.3788/AOS202141.0112001

    Topics