High Power Laser and Particle Beams, Volume. 33, Issue 4, 041001(2021)

Influence of ammonia-hexamethyldisilazane on environmental stability of SiO2 chemical film

Xibing Chen1...2, Xiaodong Jiang2,*, Linhong Cao1, Yajun Fu1, Hongwei Yan2 and Lianghong Yan2 |Show fewer author(s)
Author Affiliations
  • 1Southwest University of Science and Technology, Mianyang 621010, China
  • 2Laser Fusion Research Center, CAEP, Mianyang 621900, China
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    Figures & Tables(8)
    [in Chinese]
    [in Chinese]
    [in Chinese]
    [in Chinese]
    [in Chinese]
    [in Chinese]
    • Table 1. [in Chinese]

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      Table 1. [in Chinese]

      ammonia-HMDS/mLT/mm relative shrinkage/%n
      before modificationafter modificationbefore modificationafter modification
      5/580.8170.4612.801.19111.2021
      10/1080.6169.3713.941.19141.2023
      15/1580.6768.8614.631.19131.2025
      30/3080.3468.3114.971.19081.2029
      50/5080.0768.6614.251.19021.2029
    • Table 2. [in Chinese]

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      Table 2. [in Chinese]

      porosity samplePrelative change
      before modificationafter modification
      b0.6300.6060.024
      c0.6290.6050.024
      d0.6300.6050.025
      e0.6310.6060.025
      f0.6310.6020.029
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    Xibing Chen, Xiaodong Jiang, Linhong Cao, Yajun Fu, Hongwei Yan, Lianghong Yan. Influence of ammonia-hexamethyldisilazane on environmental stability of SiO2 chemical film[J]. High Power Laser and Particle Beams, 2021, 33(4): 041001

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    Paper Information

    Category: High Power Laser Physics and Technology

    Received: Nov. 21, 2020

    Accepted: --

    Published Online: Jun. 24, 2021

    The Author Email: Jiang Xiaodong (jiangxdong@163.com)

    DOI:10.11884/HPLPB202133.200317

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