High Power Laser and Particle Beams, Volume. 33, Issue 4, 041001(2021)
Influence of ammonia-hexamethyldisilazane on environmental stability of SiO2 chemical film
The single-layer SiO2 chemical films prepared by sol-gel technology were modified with different amounts of ammonia-hexamethyldisilazane (HMDS) atmosphere at room temperature, and then the anti-pollution porformance of the chemical films for dibutyl phthalate (DBP) contamination were tested under low vacuum condition. In addition, the ultraviolet-visible-near-infrared spectrophotometer UV-Vis-NIR), infrared spectrometer and atomic force microscope were used to analyze the evolution of chemical film characteristics before and after modification. The results show that after DBP contamination, the peak transmittance of the chemical film modified by 15-30 mL ammonia-HMDS is 99.8%, which is increased by 3.5% compared with that of the chemical film before modification. At this time, the chemical films have excellent anti-pollution properties. Although the ammonia-HMDS treatment can significantly enhance the anti-pollution performance of DBP contamination of the chemical film, excessive amount of ammonia-HMDS will lead to the laser damage threshold of the chemical film to decrease from 24.3 J/cm2 to 19.3 J/cm2. The research is helpful to optimize the process parameters to improve the anti-pollution performance of the chemical film, which has great significance for practical engineering applications.
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Xibing Chen, Xiaodong Jiang, Linhong Cao, Yajun Fu, Hongwei Yan, Lianghong Yan. Influence of ammonia-hexamethyldisilazane on environmental stability of SiO2 chemical film[J]. High Power Laser and Particle Beams, 2021, 33(4): 041001
Category: High Power Laser Physics and Technology
Received: Nov. 21, 2020
Accepted: --
Published Online: Jun. 24, 2021
The Author Email: Jiang Xiaodong (jiangxdong@163.com)