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International Journal of Extreme Manufacturing, Volume. 5, Issue 4, 42001(2023)

Comparative coherence between layered and traditional semiconductors: unique opportunities for heterogeneous integration

[in Chinese]1... [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, [in Chinese]1, and [in Chinese]12,* |Show fewer author(s)
Author Affiliations
  • 1State Key Laboratory of New Ceramics and Fine Processing, Key Laboratory of Advanced Materials of Ministry of Education, School of Materials Science and Engineering, Tsinghua University, Beijing 100084, People’s Republic of China
  • 2Beijing Advanced Innovation Center for Integrated Circuits, Beijing 100084, People’s Republic of China
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    [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese], [in Chinese]. Comparative coherence between layered and traditional semiconductors: unique opportunities for heterogeneous integration[J]. International Journal of Extreme Manufacturing, 2023, 5(4): 42001

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    Paper Information

    Category: Topical Review

    Received: Feb. 12, 2023

    Accepted: --

    Published Online: Jul. 24, 2024

    The Author Email: (chenwang0101@tsinghua.edu.cn)

    DOI:10.1088/2631-7990/ace501

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology