Fig. 1. XPS compositional analysis of La doped Y₂O₃ thin films with different powers. (a) XPS spectrum of La doped Y₂O₃ films with different powers; (b)-(d) Y3d, O1s, and La spectra of samples, respectively

Fig. 2. Spectrum of La doped Y₂O₃ samples with different powers, Y3d: (a) 0 W, (c) 50 W, (e) 80 W and O1s: (b) 0 W, (d) 50 W, (f) 80 W

Fig. 3. GIXRD spectra of La doped Y₂O₃ thin films with different powers

Fig. 4. SEM images of La doped Y₂O₃ films with different powers. (a) 40 W; (b) 50 W; (c) 60 W; (d) 80 W

Fig. 5. AFM images of La doped Y₂O₃ films with different powers. (a) 40 W; (b) 50 W; (c) 60 W; (d) 80 W

Fig. 6. SEM images of La doped Y₂O₃ films with different powers. (a) 50 W; (b) 80 W

Fig. 7. The refractive index of La doped Y₂O₃ films with different powers; (b) The infrared transmission spectra of La doped Y₂O₃ films with different powers

Fig. 8. Mechanical properties of La doped Y₂O₃ films with different powers. (a) Hardness; (b) Elastic modulus