Fig. 1. Schematic diagram of blazed grating diffraction

Fig. 2. Experimental setup for testing grating diffraction efficiency. (a) Propagation of STXM beam; (b) 3D sketch-map of setup; (c) picture of setup assembly

Fig. 3. Ray-tracing results at 500 eV simulated by SHADOW. (a) Incident beam cross-section before Si₃N₄ window; (b) spot on grating; (c) 0th order diffraction spot on photodiode; (d) +1st order diffraction spot on photodiode

Fig. 4. Diffraction efficiency versus photon energy and incident angle. (a) 0th order; (b) 1st order

Fig. 5. Diffraction efficiency of 0th and 1st orders versus photon energy at incident angles of 13° and 15°

Fig. 6. Relationship between diffraction efficiency of 0th and 1st orders and photon energy at incident angle of 15.8°. (a) Experimental results; (b) calculated results

Fig. 7. Relationship between 1st order diffraction efficiency and photon energy at different incident angles. (a) Experimental results; (b) calculated results

Fig. 8. Relationship between 1st order diffraction efficiency and incident angle at different photon energy. (a) Experimental results; (b) calculated results

Fig. 9. Relationship between incidence angle and photon energy at peak value obtained by experiment and simulation

Fig. 10. Structure test of multilayer coated grating. (a) Cross-sectional TEM image of grating; (b) AFM result of grating