Acta Optica Sinica, Volume. 41, Issue 14, 1405001(2021)
Synchrotron Radiation Research on Diffraction Efficiency of Multilayer Coated Grating
Multilayer coated gratings have excellent diffraction performance and can be an important dispersion optical element in synchrotron radiation soft X-ray band. In order to measure the diffraction efficiency of multilayer coated gratings, a miniaturized device for measuring diffraction efficiency of the grating was designed and installed in Shanghai Synchrotron Radiation Facility. The diffraction efficiency of the grating can be detected quickly in the existing spectroscopic microscopic experimental chamber. In the photon energy range of 480--730 eV, the zero-order diffraction efficiency peak of the multilayer grating is 1.11%, while the 1st order diffraction efficiency peak is 0.52%. The factors affecting the diffraction efficiency of multilayer coated gratings were analyzed. The diffraction efficiency of multilayer coated gratings was calculated numerically by differential theory, proving the rationality of the experimental scheme. The diffraction efficiency measurement and simulations will contribute to the preparation and application of multilayer coated gratings.
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Junyao Luo, Zhi Guo, Hao Huang, Xin Ou, Xiangzhi Zhang. Synchrotron Radiation Research on Diffraction Efficiency of Multilayer Coated Grating[J]. Acta Optica Sinica, 2021, 41(14): 1405001
Category: Diffraction and Gratings
Received: Jan. 18, 2021
Accepted: Feb. 22, 2021
Published Online: Jul. 11, 2021
The Author Email: Guo Zhi (guozhi@zjlab.org.cn), Huang Hao (huanghao@mail.sim.ac.cn)