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Optics and Precision Engineering, Volume. 26, Issue 1, 70(2018)

Measurement of residual stresses in pulsed laser deposited thin films

DONG Kai-chen1...2,3,*, LOU Shuai2, YAO Jie2,3, WU Jun-qiao2,3 and YOU Zheng1 |Show fewer author(s)
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  • 3[in Chinese]
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    DONG Kai-chen, LOU Shuai, YAO Jie, WU Jun-qiao, YOU Zheng. Measurement of residual stresses in pulsed laser deposited thin films[J]. Optics and Precision Engineering, 2018, 26(1): 70

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    Received: Jul. 10, 2017

    Accepted: --

    Published Online: Mar. 14, 2018

    The Author Email: Kai-chen DONG (dkc12@mails.tsinghua.edu.cn)

    DOI:10.3788/ope.20182601.0070

    Topics

    laser devices and laser physics
    Lasers and Laser Optics
    Laser physics
    laser manufacturing
    Instrumentation, Measurement and Metrology