Electro-Optic Technology Application, Volume. 39, Issue 2, 44(2024)

Research on Three-dimensional Surface to Pography Splicing Method Based on White Light Interference

REN Ying1... HUANG Yuzheng2, WEI Changsheng1, SHEN Zhan1 and LIU Yinggang1 |Show fewer author(s)
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    References(12)

    [3] [3] GUO T, YUAN L, TANG D W, et al. Analysis of the synchronous phase-shifting method in a white-light spectral interferometer[J]. Appl Opt, 2020, 59 (10):2983-2991.

    [4] [4] LUO S J, SUZUKI T, SASAKI O, et al. Signalcorrection by detection of scanning position in a white-light interferometer for exact surface profile measurement[J].Appl Opt, 2019, 8(13): 3548-3554.

    [6] [6] LI M C, WAN D S, LEE C C. Application of white-light scanning interferometer on transparent thin-film measurement[J]. Appl Opt, 2012, 1(36): 8579-8586.

    [7] [7] FUENTE R. White light spectral interferometry as a spectrometer calibration tool[J]. Appl Spectrosc, 2014, 8(5): 525-530.

    [8] [8] LI Y, WANG S Q. Optical phasing method based on scanning white-light interferometry for multi-aperture optical telescopes[J]. Opt Lett, 2021, 46(4): 793-796.

    [10] [10] CUI K H, LIU Q, HUANG X J, et al. Scanning error detection and compensation algorithm for white-light interferometry[J]. Optics and Lasers in Engineering,2022, 28(3): 148.

    [13] [13] XIE R P, YAO J, LIU K, et al. Automatic multi-image stitching for concrete bridge inspection by combining point and line features[J]. Automation in Construction,2018(90): 265-280.

    [14] [14] QUENZEL J, ALEXANDRU R R , HOUBEN S, ct al.Online depth Calibration for RGB-D cameras using visual SLAM[J]. Intelligent Robots and Systems, 2017, 6:301-303.

    [15] [15] KIM N, LEE S W, IEE Y J, et al. Accurate roughness measurement using a method for evaluation and interpolation of the validity of height data from a scanning white-light interferometer[J]. Current Optics and Photonics, 2017, 1(6): 604-612.

    [16] [16] LEHMANN P, TERESCHENKO S, ALLENDORF B,et al. Spectral composition of low-coherence interferograms at high numerical apertures[J]. Journal of the European Optical Society-Rapid Publications, 2019, 15(1): 1-9.

    [17] [17] ALLENDORF B, KAKEL E, HA U, et al. Adaptive high-resolution Linnik interferometry for 3D measurement of microparticles[J]. Optics Letters, 2019, 44(14): 3550.

    [18] [18] TAPILOUW A M, CHANG Y, YU L, et al. Reduction of batwing effect in white light interferometry for measurement of patterned sapphire substrates (PSS) wafer[C]//Interferometry XVIII. International Society for Optics and Photonics, 2016, 9960: 996006.

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    REN Ying, HUANG Yuzheng, WEI Changsheng, SHEN Zhan, LIU Yinggang. Research on Three-dimensional Surface to Pography Splicing Method Based on White Light Interference[J]. Electro-Optic Technology Application, 2024, 39(2): 44

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    Paper Information

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    Received: Sep. 25, 2023

    Accepted: --

    Published Online: Aug. 23, 2024

    The Author Email:

    DOI:

    CSTR:32186.14.

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